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Reducing parasitic effects of actuation and sensing schemes for piezoelectric microelectromechanical resonators
F. Mathieu, F. Larramendy, D. Dezest, C. Huang, G. Lavallee, S. Miller, C. M. Eichfeld, W. Mansfield, S. Trolier-McKinstry, L. Nicu
Research output: Contribution to journal › Article › peer-review
9
Scopus
citations