Reducing parasitic effects of actuation and sensing schemes for piezoelectric microelectromechanical resonators
- F. Mathieu
- , F. Larramendy
- , D. Dezest
- , C. Huang
- , G. Lavallee
- , S. Miller
- , C. M. Eichfeld
- , W. Mansfield
- , S. Trolier-McKinstry
- , L. Nicu
Research output: Contribution to journal › Article › peer-review
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