Reduction of adhesion and friction of silicon oxide surface in the presence of n-propanol vapor in the gas phase

K. Strawhecker; D. B. Asay; J. McKinney; S. H. Kim

doi:10.1007/s11249-004-4261-2

Reduction of adhesion and friction of silicon oxide surface in the presence of n-propanol vapor in the gas phase

K. Strawhecker, D. B. Asay, J. McKinney, S. H. Kim

Research output: Contribution to journal › Article › peer-review

58 Scopus citations

Abstract

The equilibrium adsorption of gas phase alcohol molecules has been proposed as a new means of in-use anti-stiction and lubrication for MEMS devices. Adhesion and friction of silicon oxide surfaces as a function of n-propanol vapor pressure in the ambient gas were invesitigated using atomic force microscopy. As the vapor pressure increases, the adsorbed n-propanol layer thickness increases. The adhesion and friction significantly decrease with very little addition of n-propanol vapor.

Original language	English (US)
Pages (from-to)	17-21
Number of pages	5
Journal	Tribology Letters
Volume	19
Issue number	1
DOIs	https://doi.org/10.1007/s11249-004-4261-2
State	Published - May 2005

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1007/s11249-004-4261-2

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title = "Reduction of adhesion and friction of silicon oxide surface in the presence of n-propanol vapor in the gas phase",

abstract = "The equilibrium adsorption of gas phase alcohol molecules has been proposed as a new means of in-use anti-stiction and lubrication for MEMS devices. Adhesion and friction of silicon oxide surfaces as a function of n-propanol vapor pressure in the ambient gas were invesitigated using atomic force microscopy. As the vapor pressure increases, the adsorbed n-propanol layer thickness increases. The adhesion and friction significantly decrease with very little addition of n-propanol vapor.",

author = "K. Strawhecker and Asay, {D. B.} and J. McKinney and Kim, {S. H.}",

note = "Funding Information: This work is supported by Penn State Start-up Funds and National Science Foundation (Grant No. CMS-0408369). The summer REU program for J. P. Mc-Kinney was supported by Penn State Materials Research Institute and the Penn State MRSEC under NSF Grant DMR 0213623.",

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T1 - Reduction of adhesion and friction of silicon oxide surface in the presence of n-propanol vapor in the gas phase

AU - Strawhecker, K.

AU - Asay, D. B.

AU - McKinney, J.

AU - Kim, S. H.

N1 - Funding Information: This work is supported by Penn State Start-up Funds and National Science Foundation (Grant No. CMS-0408369). The summer REU program for J. P. Mc-Kinney was supported by Penn State Materials Research Institute and the Penn State MRSEC under NSF Grant DMR 0213623.

PY - 2005/5

Y1 - 2005/5

N2 - The equilibrium adsorption of gas phase alcohol molecules has been proposed as a new means of in-use anti-stiction and lubrication for MEMS devices. Adhesion and friction of silicon oxide surfaces as a function of n-propanol vapor pressure in the ambient gas were invesitigated using atomic force microscopy. As the vapor pressure increases, the adsorbed n-propanol layer thickness increases. The adhesion and friction significantly decrease with very little addition of n-propanol vapor.

AB - The equilibrium adsorption of gas phase alcohol molecules has been proposed as a new means of in-use anti-stiction and lubrication for MEMS devices. Adhesion and friction of silicon oxide surfaces as a function of n-propanol vapor pressure in the ambient gas were invesitigated using atomic force microscopy. As the vapor pressure increases, the adsorbed n-propanol layer thickness increases. The adhesion and friction significantly decrease with very little addition of n-propanol vapor.

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Reduction of adhesion and friction of silicon oxide surface in the presence of n-propanol vapor in the gas phase

Abstract

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