Repetitive control of an electrostatic microbridge actuator

Haiyu Zhao; Christopher D. Rahn; Huseyin Canbolat

doi:10.1115/IMECE2005-80019

Repetitive control of an electrostatic microbridge actuator

Haiyu Zhao, Christopher D. Rahn, Huseyin Canbolat

Research output: Contribution to conference › Paper › peer-review

2 Scopus citations

Abstract

Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.

Original language	English (US)
Pages	453-460
Number of pages	8
DOIs	https://doi.org/10.1115/IMECE2005-80019
State	Published - Jan 1 2005
Event	2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States Duration: Nov 5 2005 → Nov 11 2005

Other

Other	2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005
Country/Territory	United States
City	Orlando, FL
Period	11/5/05 → 11/11/05

All Science Journal Classification (ASJC) codes

Control and Systems Engineering

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10.1115/IMECE2005-80019

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@conference{ccbd2c63a8894f7b8a51aea6c5c32a89,

title = "Repetitive control of an electrostatic microbridge actuator",

abstract = "Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.",

author = "Haiyu Zhao and Rahn, {Christopher D.} and Huseyin Canbolat",

year = "2005",

month = jan,

day = "1",

doi = "10.1115/IMECE2005-80019",

language = "English (US)",

pages = "453--460",

note = "2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005 ; Conference date: 05-11-2005 Through 11-11-2005",

}

TY - CONF

T1 - Repetitive control of an electrostatic microbridge actuator

AU - Zhao, Haiyu

AU - Rahn, Christopher D.

AU - Canbolat, Huseyin

PY - 2005/1/1

Y1 - 2005/1/1

N2 - Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.

AB - Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.

UR - http://www.scopus.com/inward/record.url?scp=33645020804&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33645020804&partnerID=8YFLogxK

U2 - 10.1115/IMECE2005-80019

DO - 10.1115/IMECE2005-80019

M3 - Paper

AN - SCOPUS:33645020804

SP - 453

EP - 460

T2 - 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005

Y2 - 5 November 2005 through 11 November 2005

ER -

Repetitive control of an electrostatic microbridge actuator

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