Abstract
Biomimetics involves the implementation of ideas and concepts from nature in different technoscientific fields. Aiming at the further development of biomimetic optical metamaterials and devices, we devised the conformal-evaporated-filmby- rotation (CEFR) technique to fabricate inorganic replicas of biotemplates with high reliability and fidelity at the micro- and nano-scales. Some potential applications include high-sensitivity chemical sensors and biosensors, textured coatings for solar cells and other energy-harvesting structures, environmental sensors, high-speed motion detectors, surveillance systems, cameras for image-guided surgeries, as well as for many clinical treatments that can be controlled by implanted light-delivery devices. Moreover, we demonstrated the successful conformal coating of the external surface of a MEMS comb resonator by the CEFR technique, thereby extending application to microelectronics.
| Original language | English (US) |
|---|---|
| Article number | 720507 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 7205 |
| DOIs | |
| State | Published - 2009 |
| Event | Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II - San Jose, CA, United States Duration: Jan 26 2009 → Jan 28 2009 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering