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Retention Analysis of Ferroelectric FETs with Gate-Side Injection for Vertical NAND Storage

  • Yixin Qin
  • , Saikat Chakraborty
  • , Zijian Zhao
  • , Sizhe Ma
  • , Moonyoung Jung
  • , Kijoon Kim
  • , Suhwan Lim
  • , Kwangyou Seo
  • , Kwangsoo Kim
  • , Wanki Kim
  • , Daewon Ha
  • , Vijaykrishnan Narayanan
  • , Jaydeep P. Kulkarni
  • , Kai Ni

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study investigates the retention behavior of gate-side injection ferroelectric FETs for vertical NAND applications. Experimental results demonstrate that thicker blocking oxide layers enhance the initial memory window but result in greater retention loss at elevated temperatures due to the higher depolarization field within the ferroelectric layer. Additionally, thinner ferroelectric layers exhibit accelerated retention degradation, while thicker ferroelectric layers provide improved stability and polarization retention over time. TCAD simulations align closely with the experimental observations, providing a detailed understanding of the interplay between polarization, charge trapping, and depolarization fields. These findings offer valuable insights into optimizing layer thicknesses to enhance the retention characteristics and reliability of future vertical ferroelectric NAND storage solutions.

Original languageEnglish (US)
Title of host publication2025 IEEE International Reliability Physics Symposium, IRPS 2025 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798331504779
DOIs
StatePublished - 2025
Event2025 IEEE International Reliability Physics Symposium, IRPS 2025 - Monterey, United States
Duration: Mar 30 2025Apr 3 2025

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Conference

Conference2025 IEEE International Reliability Physics Symposium, IRPS 2025
Country/TerritoryUnited States
CityMonterey
Period3/30/254/3/25

All Science Journal Classification (ASJC) codes

  • General Engineering

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