RF MEMS piezoelectric switch

S. J. Gross, Q. Q. Zhang, Susan E. Trolier-McKinstry, Srinivas A. Tadigadapa, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations


In this paper discussed about the fabrication PbZrTiO3 film for switch. This fabricated switches were tested and resonance frequency measurements also carried out.

Original languageEnglish (US)
Title of host publication61st Device Research Conference, DRC 2003 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages2
ISBN (Electronic)0780377273
StatePublished - 2003
Event61st Device Research Conference, DRC 2003 - Salt Lake City, United States
Duration: Jun 23 2003Jun 25 2003

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770


Other61st Device Research Conference, DRC 2003
Country/TerritoryUnited States
CitySalt Lake City

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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