TY - GEN
T1 - Ring PMUT array based miniaturized photoacoustic endoscopy device
AU - Dangi, Ajay
AU - Agrawal, Sumit
AU - Tiwari, Sudhanshu
AU - Jadhav, Shubham
AU - Cheng, Christopher
AU - Datta, Gaurav Ramesh
AU - Trolier-Mckinstry, Susan
AU - Pratap, Rudra
AU - Kothapalli, Sri Rajasekhar
N1 - Funding Information:
This work was supported by the National Institute of Biomedical Imaging and Bioengineering (NIBIB), National Institute of Health (NIH), U.S. under Grant R00EB017729-04 (SRK). Chris Cheng was supported by the Department of Defense (DoD) through the National Defense Science & Engineering Graduate Fellowship (NDSEG) Program. Cheng and Trolier-McKinstry gratefully acknowledge funding from The Center for Nanoscale Science, a Materials Research Science and Engineering Center (MRSEC) supported by the National Science Foundation under grant DMR-1420620. The authors are also thankful for the support from National Nano Fabrication Centre (NNFC) and Micro and Nano Characterization Facility (MNCF) at Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore for device fabrication.
Publisher Copyright:
© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
PY - 2019
Y1 - 2019
N2 - The first successful validation of a forward-looking Piezoelectric Micromachined Ultrasound Transducer (PMUT) ring array designed for photoacoustic endoscopic imaging applications is presented. PMUT ring arrays were fabricated with a 0.5 mm inner diameter, to allow insertion of an optical fiber for light delivery, and ∼2.5 mm overall outer diameter. Each ring array consisted of 6 elements, with a total of 102 PMUT cells, or 17 cells per element. Each PMUT cell has a 100 μm diameter multi-layered diaphragm having a ∼700 nm thick c-axis oriented aluminium nitride (AlN) thin film as the piezoelectric layer over a Si (handle layer) / SiO2 (1 μm) / Si (10 μm) / SiO2 (100 nm) / TiO2 (40 nm) / Pt (150 nm) substrate to act as an ultrasound receive element. The resonant frequency was ∼ 6 MHz in water. The output end of an optical fiber, coupled to a pulsed laser diode (PLD), was fitted with a 2.5 mm ferrule. The PMUT ring array was concentrically mounted on the ferrule to obtain a miniaturized endoscopic PAI device. The observed photoacoustic bandwidth was ∼75%, and a strong photoacoustic signal of ∼13 mV peak-to-peak output was observed from a light absorbing target kept 5 mm away from the PMUT array. 2D and 3D photoacoustic images of the targets were obtained via raster scanning of the phantom sample. In the future, the functionality of the PMUT ring array will be enhanced through multichannel acquisition to obtain variable acoustic focus and limited view photoacoustic images in real time.
AB - The first successful validation of a forward-looking Piezoelectric Micromachined Ultrasound Transducer (PMUT) ring array designed for photoacoustic endoscopic imaging applications is presented. PMUT ring arrays were fabricated with a 0.5 mm inner diameter, to allow insertion of an optical fiber for light delivery, and ∼2.5 mm overall outer diameter. Each ring array consisted of 6 elements, with a total of 102 PMUT cells, or 17 cells per element. Each PMUT cell has a 100 μm diameter multi-layered diaphragm having a ∼700 nm thick c-axis oriented aluminium nitride (AlN) thin film as the piezoelectric layer over a Si (handle layer) / SiO2 (1 μm) / Si (10 μm) / SiO2 (100 nm) / TiO2 (40 nm) / Pt (150 nm) substrate to act as an ultrasound receive element. The resonant frequency was ∼ 6 MHz in water. The output end of an optical fiber, coupled to a pulsed laser diode (PLD), was fitted with a 2.5 mm ferrule. The PMUT ring array was concentrically mounted on the ferrule to obtain a miniaturized endoscopic PAI device. The observed photoacoustic bandwidth was ∼75%, and a strong photoacoustic signal of ∼13 mV peak-to-peak output was observed from a light absorbing target kept 5 mm away from the PMUT array. 2D and 3D photoacoustic images of the targets were obtained via raster scanning of the phantom sample. In the future, the functionality of the PMUT ring array will be enhanced through multichannel acquisition to obtain variable acoustic focus and limited view photoacoustic images in real time.
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U2 - 10.1117/12.2510000
DO - 10.1117/12.2510000
M3 - Conference contribution
AN - SCOPUS:85065444529
T3 - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
BT - Photons Plus Ultrasound
A2 - Oraevsky, Alexander A.
A2 - Wang, Lihong V.
PB - SPIE
T2 - Photons Plus Ultrasound: Imaging and Sensing 2019
Y2 - 3 February 2019 through 6 February 2019
ER -