Abstract
We combine electron spin resonance measurements with vacuum ultraviolet, ultraviolet, and corona bias charge injection schemes to examine the properties and charge trapping roles of three E' variants in conventionally processed thermally grown thin film SiO2 on Si.
Original language | English (US) |
---|---|
Pages (from-to) | 37-42 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 338 |
DOIs | |
State | Published - 1994 |
Event | Proceedings of the 1994 MRS Spring Meeting - San Francisco, CA, USA Duration: Apr 5 1994 → Apr 8 1994 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering