Abstract
A novel microthermopile for CO2 laser radiation detection with a fast response time has been fabricated for the first time. The microthermopile is fabricated by high-resolution e-beam lithography and isotropic plasma etching of the substrate resulting in free-standing hot junctions which are thermally isolated from the substrate. The good thermal isolation and small heat capacity of the hot junctions resulted in a responsivity of 60 V/W and a time constant of 20 μs. The device operates over the entire CO2 laser wavelength range from 9.4 to 10.6 μm. Detailed measurements are presented for 10.6 μm operation.
Original language | English (US) |
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Pages (from-to) | 1529-1531 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 59 |
Issue number | 13 |
DOIs | |
State | Published - 1991 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)