TY - JOUR
T1 - Room temperature infrared imaging array fabricated using heterogeneous integration methods
AU - Pisani, Marcelo B.
AU - Ren, Kailiang
AU - Kao, Ping
AU - Tadigadapa, Srinivas
N1 - Funding Information:
This work has been supported by the US Army Research Office Grant # W911NF-07-1-0327 and by the NSF National Nanotechnology Infrastructure Network(NNIN Agreement 0 335 765).
PY - 2010
Y1 - 2010
N2 - This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited infrared imaging arrays operating at room temperature. High frequency (241 MHz) micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.16 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz1/2, a detectivity D* of 9.17x107 cm Hz1/2/W, and noise equivalent temperature difference (NETD) of 46.6 mK in the 8-14 μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability as a video-rate uncooled infrared sensor.
AB - This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited infrared imaging arrays operating at room temperature. High frequency (241 MHz) micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.16 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz1/2, a detectivity D* of 9.17x107 cm Hz1/2/W, and noise equivalent temperature difference (NETD) of 46.6 mK in the 8-14 μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability as a video-rate uncooled infrared sensor.
UR - https://www.scopus.com/pages/publications/78650620819
UR - https://www.scopus.com/inward/citedby.url?scp=78650620819&partnerID=8YFLogxK
U2 - 10.1016/j.proeng.2010.09.266
DO - 10.1016/j.proeng.2010.09.266
M3 - Article
AN - SCOPUS:78650620819
SN - 1877-7058
VL - 5
SP - 952
EP - 955
JO - Procedia Engineering
JF - Procedia Engineering
ER -