Room temperature infrared imaging array fabricated using heterogeneous integration methods

This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited infrared imaging arrays operating at room temperature. High frequency (241 MHz) micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.16 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz^1/2, a detectivity D* of 9.17x10⁷ cm Hz^1/2/W, and noise equivalent temperature difference (NETD) of 46.6 mK in the 8-14 μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability as a video-rate uncooled infrared sensor.