TY - GEN
T1 - SAMS and protein adsorption studies for the calibration of miniaturized quartz crystal microbalance arrays
AU - Kao, Ping
AU - Goyal, Abhijat
AU - Allara, David
AU - Tadigadapa, Srinivas
PY - 2007
Y1 - 2007
N2 - We report the design and fabrication of a micromachined quartz crystal balance (QCM) array for self assembled monolayers (SAMs) and protein adsorption studies. The microQCM was fabricated using recently developed inductively coupled plasma etching process for quartz to realize resonators with 60 μm thickness and electrode diameters of 0.5 mm. The reduction in the thickness and lateral pixel size has resulted in a sensitivity improvement by factor of 1364 over a commercially available macro-sized QCM. In both rigid and viscoelastic film adsorption limits, we find the microQCM to exhibit three times greater sensitivity than the predicted value when operated at the third overtone. These results show that the micromachined QCM in array format is a very sensitive gravimetric sensor capable of mass resolutions into the femtograms range.
AB - We report the design and fabrication of a micromachined quartz crystal balance (QCM) array for self assembled monolayers (SAMs) and protein adsorption studies. The microQCM was fabricated using recently developed inductively coupled plasma etching process for quartz to realize resonators with 60 μm thickness and electrode diameters of 0.5 mm. The reduction in the thickness and lateral pixel size has resulted in a sensitivity improvement by factor of 1364 over a commercially available macro-sized QCM. In both rigid and viscoelastic film adsorption limits, we find the microQCM to exhibit three times greater sensitivity than the predicted value when operated at the third overtone. These results show that the micromachined QCM in array format is a very sensitive gravimetric sensor capable of mass resolutions into the femtograms range.
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U2 - 10.1109/SENSOR.2007.4300632
DO - 10.1109/SENSOR.2007.4300632
M3 - Conference contribution
AN - SCOPUS:50049090817
SN - 1424408423
SN - 9781424408429
T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 2311
EP - 2314
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Y2 - 10 June 2007 through 14 June 2007
ER -