Science and technology of piezoelectric/diamond heterostructures for monolithically integrated high performance MEMS/NEMS/CMOS devices

O. Auciello, A. V. Sumant, J. Hiller, Bernd C. Kabius, Z. Ma, S. Srinivasan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the fundamental and applied science performed to integrate piezoelectric PbZrxTi1-xO3 and AlN films with a novel mechanically robust ultrananocrystalline diamond layer to enable a new generation of low voltage / high-performance piezoactuated hybrid piezoelectric/diamond MEMS/NEMS devices.

Original languageEnglish (US)
Title of host publication17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
DOIs
StatePublished - Dec 1 2008
Event17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 - Santa Fe, NM, United States
Duration: Feb 23 2008Feb 28 2008

Publication series

NameIEEE International Symposium on Applications of Ferroelectrics
Volume3

Other

Other17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
Country/TerritoryUnited States
CitySanta Fe, NM
Period2/23/082/28/08

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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