@inproceedings{b4d54bbc5d35439a9b396acf0ca9a454,
title = "Science and technology of piezoelectric/diamond heterostructures for monolithically integrated high performance MEMS/NEMS/CMOS devices",
abstract = "This paper describes the fundamental and applied science performed to integrate piezoelectric PbZrxTi1-xO3 and AlN films with a novel mechanically robust ultrananocrystalline diamond layer to enable a new generation of low voltage / high-performance piezoactuated hybrid piezoelectric/diamond MEMS/NEMS devices.",
author = "O. Auciello and Sumant, {A. V.} and J. Hiller and Kabius, {Bernd C.} and Z. Ma and S. Srinivasan",
year = "2008",
month = dec,
day = "1",
doi = "10.1109/ISAF.2008.4693745",
language = "English (US)",
isbn = "1424427444",
series = "IEEE International Symposium on Applications of Ferroelectrics",
booktitle = "17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008",
note = "17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 ; Conference date: 23-02-2008 Through 28-02-2008",
}