Science and technology of piezoelectric/diamond hybrid heterostructures for high performance MEMS/NEMS devices

Orlando Auciello; Anirudha Sumant; Jon Hiller; Bernd C. Kabius; Sudarsan Srinivasan

Science and technology of piezoelectric/diamond hybrid heterostructures for high performance MEMS/NEMS devices

Orlando Auciello
, Anirudha Sumant
, Jon Hiller
, Bernd C. Kabius
, Sudarsan Srinivasan

Materials Research Institute (MRI)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent mechanical and tribological properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(Zr _xTi_1-x)O₃ (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

Original language	English (US)
Title of host publication	Microelectromechanical Systems - Materials and Devices
Pages	259-264
Number of pages	6
Volume	1052
State	Published - 2008
Event	Microelectromechanical Systems - Materials and Devices - Boston, MA, United States Duration: Nov 26 2007 → Nov 28 2007

Other

Other	Microelectromechanical Systems - Materials and Devices
Country/Territory	United States
City	Boston, MA
Period	11/26/07 → 11/28/07

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials

Cite this

@inproceedings{2fbcf9fe92a244b287efb468e4189433,

title = "Science and technology of piezoelectric/diamond hybrid heterostructures for high performance MEMS/NEMS devices",

abstract = "Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD{\textregistered}) in film form with 2-5 nm grains exhibits excellent mechanical and tribological properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(Zr xTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.",

author = "Orlando Auciello and Anirudha Sumant and Jon Hiller and Kabius, \{Bernd C.\} and Sudarsan Srinivasan",

year = "2008",

language = "English (US)",

isbn = "9781558999909",

volume = "1052",

pages = "259--264",

booktitle = "Microelectromechanical Systems - Materials and Devices",

note = "Microelectromechanical Systems - Materials and Devices ; Conference date: 26-11-2007 Through 28-11-2007",

}

TY - GEN

T1 - Science and technology of piezoelectric/diamond hybrid heterostructures for high performance MEMS/NEMS devices

AU - Auciello, Orlando

AU - Sumant, Anirudha

AU - Hiller, Jon

AU - Kabius, Bernd C.

AU - Srinivasan, Sudarsan

PY - 2008

Y1 - 2008

N2 - Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent mechanical and tribological properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(Zr xTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

AB - Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent mechanical and tribological properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(Zr xTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

UR - https://www.scopus.com/pages/publications/45749119102

UR - https://www.scopus.com/pages/publications/45749119102#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:45749119102

SN - 9781558999909

VL - 1052

SP - 259

EP - 264

BT - Microelectromechanical Systems - Materials and Devices

T2 - Microelectromechanical Systems - Materials and Devices

Y2 - 26 November 2007 through 28 November 2007

ER -

Science and technology of piezoelectric/diamond hybrid heterostructures for high performance MEMS/NEMS devices

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All Science Journal Classification (ASJC) codes

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