@inproceedings{2444f2ffdf184aa89ea2414558493667,
title = "Searching for hypothetical forces in the Casimir regime using a MEMS based force sensor",
abstract = "A microelectromechanical torsional oscillator was used to obtain new constraints in the search for new Yukawa-like interactions at the ∼ 100 nm range. A new heterodyne technique was used to enhance the possible contributions of hypothetical forces, while electromagnetic interactions (including the ones associated with vacuum fluctuations), remained the same. In particular, the force between a Au-coated sphere and a Au film deposited on the oscillator was subtracted in situ from the force between the same sphere and a composite film made out of Ge and Au. The combination of the high quality factor Q of the oscillator and this new approach that greatly reduced the Casimir background yielded improvements in the constraints close to one order of magnitude over the 50-400 nm interaction range.",
author = "Decca, {Ricardo S.} and Daniel L{\'o}pez and Krause, {Dennis E.} and Ephraim Fischbach",
year = "2007",
doi = "10.1117/12.724221",
language = "English (US)",
isbn = "0819467170",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Smart Sensors, Actuators, and MEMS III",
note = "Smart Sensors, Actuators, and MEMS III ; Conference date: 02-05-2007 Through 04-05-2007",
}