Selective deposition of CuO/SnO ₂ sol-gel on porous SiO ₂ suitable for the fabrication of MEMS-based H ₂S sensors

Engineering & Materials Science

• Sol-gels 100%
• Porous silicon 75%
• MEMS 70%
• Fabrication 56%
• Silica 52%
• Oxides 43%
• Silicon 40%
• Sensors 39%
• Spin coating 37%
• Electric heating elements 34%
• Reactive ion etching 34%
• Micromachining 31%
• Crystallinity 30%
• Passivation 30%
• Electric currents 29%
• Chemical sensors 28%
• Surface morphology 28%
• Etching 27%
• Adhesion 23%
• Membranes 21%
• Textures 20%
• Scanning electron microscopy 20%
• Substrates 17%

Physics & Astronomy

• microelectromechanical systems 73%
• gels 59%
• porous silicon 54%
• sensors 46%
• fabrication 46%
• silicon dioxide 38%
• etching 38%
• oxides 31%
• plains 29%
• micromachining 28%
• silicon 27%
• electric current 25%
• passivity 23%
• coating 23%
• crystallinity 22%
• adhesion 21%
• textures 21%
• membranes 18%
• scanning electron microscopy 16%
• heating 16%
• sensitivity 14%
• gases 13%
• ions 11%

Chemical Compounds

• Silicon Dioxide 46%
• Porosity 44%
• Etching 34%
• Micromachining 26%
• Current 24%
• Coating Process 22%
• Oxide 20%
• Spin Coating 19%
• Chemical Passivation 19%
• Gas Sensor 19%
• Crystalline Texture 18%
• Nanoporosity 17%
• Crystallinity 14%
• Surface 12%
• Liquid Film 9%
• Ion 7%
• Time 6%