Self-aligned electrodes on SU-8 negative photoresist pedestals

H. Raymond Fok; Thomas N. Jackson

doi:10.1109/JMEMS.2014.2313723

Self-aligned electrodes on SU-8 negative photoresist pedestals

Research output: Contribution to journal › Article › peer-review

Abstract

We report a novel technique by which self-aligned thin-film electrodes are fabricated on SU-8 negative photoresist pedestals. A bilayer aluminum and titanium structure is used to align the thin-film electrode and to serve as the optical mask for the UV exposure of the SU-8. The SU-8 developer is used to remove both the unexposed SU-8 and the bilayer structure of aluminum and titanium. The result is a thin-film electrode aligned on an SU-8 pedestal with a minimal undercut beneath the thin-film electrode.

Original language	English (US)
Article number	6784311
Pages (from-to)	508-510
Number of pages	3
Journal	Journal of Microelectromechanical Systems
Volume	23
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2014.2313723
State	Published - Jun 2014

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2014.2313723

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title = "Self-aligned electrodes on SU-8 negative photoresist pedestals",

abstract = "We report a novel technique by which self-aligned thin-film electrodes are fabricated on SU-8 negative photoresist pedestals. A bilayer aluminum and titanium structure is used to align the thin-film electrode and to serve as the optical mask for the UV exposure of the SU-8. The SU-8 developer is used to remove both the unexposed SU-8 and the bilayer structure of aluminum and titanium. The result is a thin-film electrode aligned on an SU-8 pedestal with a minimal undercut beneath the thin-film electrode.",

author = "Fok, {H. Raymond} and Jackson, {Thomas N.}",

year = "2014",

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doi = "10.1109/JMEMS.2014.2313723",

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AU - Fok, H. Raymond

AU - Jackson, Thomas N.

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AB - We report a novel technique by which self-aligned thin-film electrodes are fabricated on SU-8 negative photoresist pedestals. A bilayer aluminum and titanium structure is used to align the thin-film electrode and to serve as the optical mask for the UV exposure of the SU-8. The SU-8 developer is used to remove both the unexposed SU-8 and the bilayer structure of aluminum and titanium. The result is a thin-film electrode aligned on an SU-8 pedestal with a minimal undercut beneath the thin-film electrode.

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Self-aligned electrodes on SU-8 negative photoresist pedestals

Abstract

All Science Journal Classification (ASJC) codes

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