Self-assembling MEMS variable and fixed RF inductors

V. M. Lubecke, B. Barber, E. Chan, D. Lopez, M. E. Gross, P. Gammel

Research output: Contribution to journalArticlepeer-review

118 Scopus citations


Inductors play a key role in wireless front-end circuitry, yet are not generally well suited for conventional RF integrated-circuit (RFIC) fabrication processes. We have developed inductors that can be fabricated on a conventional RFIC silicon substrate, which use warping members to assemble themselves away from the substrate to improve quality factor (Q) and self-resonance frequency (SRF), and to provide a degree of variation in inductance value. These self-assembling variable inductors are realized through foundry provided microelectromechanical systems (MEMS) processing and have demonstrated temperature stable Q values greater than 13, SRF values well above 15 GHz, and inductance variations greater than 18%. Simulations suggest the potential for Q values above 20 and inductance variations greater than 30%, with optimized processing.

Original languageEnglish (US)
Pages (from-to)2093-2098
Number of pages6
JournalIEEE Transactions on Microwave Theory and Techniques
Issue number11
StatePublished - Nov 2001

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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