Self-assembling MEMS variable and fixed RF inductors

Keyphrases

• Self-assembling 100%
• System Variables 100%
• Micro-electro-mechanical Systems 100%
• Self-resonance Frequency 100%
• Radio-frequency Integrated Circuit (RF IC) 100%
• RF Inductor 100%
• Inductor 100%
• Circuitry 50%
• Wireless 50%
• Silicon Substrate 50%
• Fabrication Methods 50%
• Frequency Values 50%
• Quality Factor (Q-factor) 50%
• Foundry 50%
• Temperature-stable 50%
• System Processing 50%
• Variable Inductor 50%
• Optimized Processing 50%
• Inductance Value 50%
• Integrated Circuit Manufacturing 50%

Engineering

• Microelectromechanical System 100%
• Integrated Circuit 100%
• Silicon Substrate 50%
• Resonance Frequency 50%
• Q Factor 50%
• Front End 50%
• Inductance Value 50%
• Resonance Frequency Value 50%