Self-sputtering of silver by mono- and polyatomic projectiles: A molecular dynamics investigation

M. Lindenblatt; R. Heinrich; A. Wucher; B. J. Garrison

doi:10.1063/1.1404982

Self-sputtering of silver by mono- and polyatomic projectiles: A molecular dynamics investigation

M. Lindenblatt, R. Heinrich, A. Wucher, B. J. Garrison

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30 Scopus citations

Abstract

Investigations of self-sputtering of silver under bombardment with Ag_m (m=1,2,3) projectiles was done by molecular dynamics (MD) simulations using many body MD/MC-Corrected Effective Medium Potential. Calculations of total sputtering yield and mass distribution, i.e., the distribution of monomers and clusters within the flux of sputtered particles were reported. The dependence of calculated yields on the orientation of incoming cluster was observed.

Original language	English (US)
Pages (from-to)	8643-8654
Number of pages	12
Journal	Journal of Chemical Physics
Volume	115
Issue number	18
DOIs	https://doi.org/10.1063/1.1404982
State	Published - Nov 8 2001

All Science Journal Classification (ASJC) codes

General Physics and Astronomy
Physical and Theoretical Chemistry

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10.1063/1.1404982

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abstract = "Investigations of self-sputtering of silver under bombardment with Agm (m=1,2,3) projectiles was done by molecular dynamics (MD) simulations using many body MD/MC-Corrected Effective Medium Potential. Calculations of total sputtering yield and mass distribution, i.e., the distribution of monomers and clusters within the flux of sputtered particles were reported. The dependence of calculated yields on the orientation of incoming cluster was observed.",

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AU - Lindenblatt, M.

AU - Heinrich, R.

AU - Wucher, A.

AU - Garrison, B. J.

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AB - Investigations of self-sputtering of silver under bombardment with Agm (m=1,2,3) projectiles was done by molecular dynamics (MD) simulations using many body MD/MC-Corrected Effective Medium Potential. Calculations of total sputtering yield and mass distribution, i.e., the distribution of monomers and clusters within the flux of sputtered particles were reported. The dependence of calculated yields on the orientation of incoming cluster was observed.

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Self-sputtering of silver by mono- and polyatomic projectiles: A molecular dynamics investigation

Abstract

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