Self-sustained oscillation of MEMS torsional micromirrors

D. Mukhopadhyay, D. Antonio, I. W. Jung, D. López

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


Several applications of optical micromirrors need synchronization of its mechanical oscillation with an external control signal. Self-sustained oscillation of micromirrors is a prerequisite for achieving such synchronization. To suppress its mechanical deformation these micromirrors are operated under atmospheric or controlled pressure environment. Operation under this environment leads to increase in driving voltages to achieve required deflections. However, significant parasitic crosstalk due to these high driving voltages presents a challenge for achieving their self-sustained oscillations. In this paper, stable self-sustained oscillation of a 13.5kHz micromirror is achieved at atmospheric pressure by actively suppressing its crosstalk. Frequency stability of 7.2ppm is obtained for this micromirror's self-sustained oscillation at atmospheric pressure.

Original languageEnglish (US)
Title of host publicationMOEMS and Miniaturized Systems XI
StatePublished - 2012
EventMOEMS and Miniaturized Systems XI - San Francisco, CA, United States
Duration: Jan 24 2012Jan 25 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceMOEMS and Miniaturized Systems XI
Country/TerritoryUnited States
CitySan Francisco, CA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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