Self-sustained oscillation of MEMS torsional micromirrors

D. Mukhopadhyay; D. Antonio; I. W. Jung; D. López

doi:10.1117/12.906746

Self-sustained oscillation of MEMS torsional micromirrors

D. Mukhopadhyay, D. Antonio, I. W. Jung, D. López

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

Several applications of optical micromirrors need synchronization of its mechanical oscillation with an external control signal. Self-sustained oscillation of micromirrors is a prerequisite for achieving such synchronization. To suppress its mechanical deformation these micromirrors are operated under atmospheric or controlled pressure environment. Operation under this environment leads to increase in driving voltages to achieve required deflections. However, significant parasitic crosstalk due to these high driving voltages presents a challenge for achieving their self-sustained oscillations. In this paper, stable self-sustained oscillation of a 13.5kHz micromirror is achieved at atmospheric pressure by actively suppressing its crosstalk. Frequency stability of 7.2ppm is obtained for this micromirror's self-sustained oscillation at atmospheric pressure.

Original language	English (US)
Title of host publication	MOEMS and Miniaturized Systems XI
DOIs	https://doi.org/10.1117/12.906746
State	Published - 2012
Event	MOEMS and Miniaturized Systems XI - San Francisco, CA, United States Duration: Jan 24 2012 → Jan 25 2012

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8252
ISSN (Print)	0277-786X

Conference

Conference	MOEMS and Miniaturized Systems XI
Country/Territory	United States
City	San Francisco, CA
Period	1/24/12 → 1/25/12

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.906746

Cite this

@inproceedings{c81165c8ebb94373ab6b8303825b4d1a,

title = "Self-sustained oscillation of MEMS torsional micromirrors",

abstract = "Several applications of optical micromirrors need synchronization of its mechanical oscillation with an external control signal. Self-sustained oscillation of micromirrors is a prerequisite for achieving such synchronization. To suppress its mechanical deformation these micromirrors are operated under atmospheric or controlled pressure environment. Operation under this environment leads to increase in driving voltages to achieve required deflections. However, significant parasitic crosstalk due to these high driving voltages presents a challenge for achieving their self-sustained oscillations. In this paper, stable self-sustained oscillation of a 13.5kHz micromirror is achieved at atmospheric pressure by actively suppressing its crosstalk. Frequency stability of 7.2ppm is obtained for this micromirror's self-sustained oscillation at atmospheric pressure.",

author = "D. Mukhopadhyay and D. Antonio and Jung, {I. W.} and D. L{\'o}pez",

year = "2012",

doi = "10.1117/12.906746",

language = "English (US)",

isbn = "9780819488954",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "MOEMS and Miniaturized Systems XI",

}

TY - GEN

T1 - Self-sustained oscillation of MEMS torsional micromirrors

AU - Mukhopadhyay, D.

AU - Antonio, D.

AU - Jung, I. W.

AU - López, D.

PY - 2012

Y1 - 2012

N2 - Several applications of optical micromirrors need synchronization of its mechanical oscillation with an external control signal. Self-sustained oscillation of micromirrors is a prerequisite for achieving such synchronization. To suppress its mechanical deformation these micromirrors are operated under atmospheric or controlled pressure environment. Operation under this environment leads to increase in driving voltages to achieve required deflections. However, significant parasitic crosstalk due to these high driving voltages presents a challenge for achieving their self-sustained oscillations. In this paper, stable self-sustained oscillation of a 13.5kHz micromirror is achieved at atmospheric pressure by actively suppressing its crosstalk. Frequency stability of 7.2ppm is obtained for this micromirror's self-sustained oscillation at atmospheric pressure.

AB - Several applications of optical micromirrors need synchronization of its mechanical oscillation with an external control signal. Self-sustained oscillation of micromirrors is a prerequisite for achieving such synchronization. To suppress its mechanical deformation these micromirrors are operated under atmospheric or controlled pressure environment. Operation under this environment leads to increase in driving voltages to achieve required deflections. However, significant parasitic crosstalk due to these high driving voltages presents a challenge for achieving their self-sustained oscillations. In this paper, stable self-sustained oscillation of a 13.5kHz micromirror is achieved at atmospheric pressure by actively suppressing its crosstalk. Frequency stability of 7.2ppm is obtained for this micromirror's self-sustained oscillation at atmospheric pressure.

UR - http://www.scopus.com/inward/record.url?scp=84859023514&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84859023514&partnerID=8YFLogxK

U2 - 10.1117/12.906746

DO - 10.1117/12.906746

M3 - Conference contribution

AN - SCOPUS:84859023514

SN - 9780819488954

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - MOEMS and Miniaturized Systems XI

T2 - MOEMS and Miniaturized Systems XI

Y2 - 24 January 2012 through 25 January 2012

ER -

Self-sustained oscillation of MEMS torsional micromirrors

Abstract

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