SEM studies of nonuniformieties and defects in GaN and AlGaN epitaxial films

A. V. Govorkov, A. Y. Polyakov, N. B. Smirnov, Joan Marie Redwing, M. Skowronski, M. Shin

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	471-476
Number of pages	6
Journal	Izvestiya Akademii Nauk. Ser. Fizicheskaya
Volume	62
Issue number	3
State	Published - Dec 1 1998

All Science Journal Classification (ASJC) codes

@article{be593b6ae75342f998854841912484f3,

title = "SEM studies of nonuniformieties and defects in GaN and AlGaN epitaxial films",

author = "Govorkov, {A. V.} and Polyakov, {A. Y.} and Smirnov, {N. B.} and Redwing, {Joan Marie} and M. Skowronski and M. Shin",

year = "1998",

month = dec,

day = "1",

language = "English (US)",

volume = "62",

pages = "471--476",

journal = "Izvestiya Akademii Nauk. Ser. Fizicheskaya",

issn = "0367-6765",

publisher = "Izdatel'stvo Nauka",

number = "3",

}

TY - JOUR

T1 - SEM studies of nonuniformieties and defects in GaN and AlGaN epitaxial films

AU - Govorkov, A. V.

AU - Polyakov, A. Y.

AU - Smirnov, N. B.

AU - Redwing, Joan Marie

AU - Skowronski, M.

AU - Shin, M.

PY - 1998/12/1

Y1 - 1998/12/1

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EP - 476

JO - Izvestiya Akademii Nauk. Ser. Fizicheskaya

JF - Izvestiya Akademii Nauk. Ser. Fizicheskaya

IS - 3

ER -