Sensors for material process monitoring and control

Bernhard R. Tittmann, C. Eric Yen, C. A. Moose

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This report briefly reviews recent progress in the use of sensors to monitor critical parameters during material processing. The techniques focus on the use of waveguides providing an ultrasonic link between the detector and the part in the furnace.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsAntoni Sliwinski, Piotr Kwiek, B. Linde, A. Markiewicz
Number of pages4
StatePublished - 1995
EventAcousto-Optics and Applications II - Gdansk-Jurata, Pol
Duration: May 22 1995May 26 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherAcousto-Optics and Applications II
CityGdansk-Jurata, Pol

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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