@inproceedings{930150a438764112841419fc549b33e9,
title = "Silicon nanocrystals synthesized by electron-beam co-evaporation method and their application for nonvolatile memory",
abstract = "The Silicon nanocrystals designed for nonvolatile memory applications are for the first time prepared by electron beam co-evaporation of Si and SiO 2 hybrid. Transmission electron microscopy observation and Raman scattering certify the formation of Si NCs. Metal-oxide-semiconductor capacitor structures with Si NCs embedded in the gate oxide are fabricated to characterize the memory behavior. High-frequency capacitance-voltage and capacitance-time measurements demonstrate the memory behavior of the structure resulting from the charging/discharging behaviors of Si NCs. It is found that the flatband voltage can be changed by adjusting the concentration of Si and SiO2 in the hybrids. The Si nanocrystals memory device has yielded good retention characteristics with small charge loss.",
author = "Chen Chen and Rui Jia and Ming Liu and Li, {Wei Long} and Zhu, {Chen Xin} and Li, {Hao Feng} and Zhang, {Pei Wen} and Xie, {Chang Qing} and Qin Wang and Ye, {Tian Chun}",
note = "Funding Information: This work is subsidized by the 973 Projects 2006CB604904, 2006CB302706, 2009CB939703, 2009CB939700, by the Chinese NSF under Grant Nos.60706023, 60676001, 90401002, 90607022, by CAS YZ0635 and by CAS “Bai Ren Ji Hua”.; ISTC/CSTIC 2009 (CISTC) ; Conference date: 19-03-2009 Through 20-03-2009",
year = "2009",
doi = "10.1149/1.3096434",
language = "English (US)",
isbn = "9781615676460",
series = "ECS Transactions",
number = "1 PART 1",
pages = "93--98",
booktitle = "ECS Transactions - ISTC/CSTIC 2009 (CISTC)",
edition = "1 PART 1",
}