Simulation algorithm and automated mask generation of SAW delay lines

Haofeng Li; Rui Jia; Dongmei Li; Ming Liu; Weilong Li; Chen Chen; Chenxin Zhu

Simulation algorithm and automated mask generation of SAW delay lines

Haofeng Li, Rui Jia, Dongmei Li, Ming Liu, Weilong Li, Chen Chen, Chenxin Zhu

Materials Research Institute (MRI)

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A platform for simulation of SPUDT SAW delay lines was designed and analyzed by MATLAB. This transducer could be considered as the networks of connection of some units of IDTs and the loss of device could be therefore effectively reduced. Based on the Coupling of Modes (COM) theory and equivalent circuit modal, the mixed matrix(P matrix) of the transducers was deduced, and further, the response of the delay lines could be obtained. User-friendly interface was also made by MATLAB in which the designer could adjust parameters and generate the hard mask of the fingers for photolithograph. The theoretical simulation is found to agree with the experimental results.

Original language	English (US)
Pages (from-to)	717-720
Number of pages	4
Journal	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
Volume	32
Issue number	5
State	Published - Oct 2010

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Acoustics and Ultrasonics
Materials Chemistry

Cite this

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title = "Simulation algorithm and automated mask generation of SAW delay lines",

abstract = "A platform for simulation of SPUDT SAW delay lines was designed and analyzed by MATLAB. This transducer could be considered as the networks of connection of some units of IDTs and the loss of device could be therefore effectively reduced. Based on the Coupling of Modes (COM) theory and equivalent circuit modal, the mixed matrix(P matrix) of the transducers was deduced, and further, the response of the delay lines could be obtained. User-friendly interface was also made by MATLAB in which the designer could adjust parameters and generate the hard mask of the fingers for photolithograph. The theoretical simulation is found to agree with the experimental results.",

author = "Haofeng Li and Rui Jia and Dongmei Li and Ming Liu and Weilong Li and Chen Chen and Chenxin Zhu",

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T1 - Simulation algorithm and automated mask generation of SAW delay lines

AU - Li, Haofeng

AU - Jia, Rui

AU - Li, Dongmei

AU - Liu, Ming

AU - Li, Weilong

AU - Chen, Chen

AU - Zhu, Chenxin

PY - 2010/10

Y1 - 2010/10

N2 - A platform for simulation of SPUDT SAW delay lines was designed and analyzed by MATLAB. This transducer could be considered as the networks of connection of some units of IDTs and the loss of device could be therefore effectively reduced. Based on the Coupling of Modes (COM) theory and equivalent circuit modal, the mixed matrix(P matrix) of the transducers was deduced, and further, the response of the delay lines could be obtained. User-friendly interface was also made by MATLAB in which the designer could adjust parameters and generate the hard mask of the fingers for photolithograph. The theoretical simulation is found to agree with the experimental results.

AB - A platform for simulation of SPUDT SAW delay lines was designed and analyzed by MATLAB. This transducer could be considered as the networks of connection of some units of IDTs and the loss of device could be therefore effectively reduced. Based on the Coupling of Modes (COM) theory and equivalent circuit modal, the mixed matrix(P matrix) of the transducers was deduced, and further, the response of the delay lines could be obtained. User-friendly interface was also made by MATLAB in which the designer could adjust parameters and generate the hard mask of the fingers for photolithograph. The theoretical simulation is found to agree with the experimental results.

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VL - 32

SP - 717

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JF - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

IS - 5

ER -

Simulation algorithm and automated mask generation of SAW delay lines

Abstract

All Science Journal Classification (ASJC) codes

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