Abstract
Single-domain single crystal thin films of ferroelectric PbTiO3 (PT) were epitaxially grown on the miscut SrTiO3 (ST) substrate by the sputtering. The film thickness was ranged from 5 to 260 nm. The films were grown under the step flow growth. The PT thin films were tetragonally deformed and tightly bonded to the substrate without an interfacial layer. The saturation polarization, the coercive field, and the dielectric constant were 40 μC/cm2, 400 to 500 kV/cm, and 60 to 70 (at 1 kHz), respectively. The PT thin films showed no clear anomaly on the curve of c-lattice parameter in term of temperature.
Original language | English (US) |
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Pages (from-to) | 619-624 |
Number of pages | 6 |
Journal | Proceedings of the IEEE Ultrasonics Symposium |
Volume | 1 |
State | Published - Dec 1 1998 |
Event | Proceedings of the 1998 International Ultrasonics Symposium - Sendai, Miyagi, Jpn Duration: Oct 5 1998 → Oct 8 1998 |
All Science Journal Classification (ASJC) codes
- Acoustics and Ultrasonics