Soft X-ray spectroscopy using charge-coupled devices with thin poly gates and floating gate output amplifiers

We present data from a charge-coupled device (CCD), collaboratively designed by PSU/JPL/Loral, which incorporates several novel features that make it well suited for soft X-ray spectroscopy. It is a three-phase, frontside illuminated device with 1024×1024 pixels. Each pixel is 18 microns by 18 microns. The device has four output amplifiers: two conventional floating diffusion amplifiers (FDAs) and two floating gate amplifiers (FGAs). The FGA non-destructively samples the output charge, allowing the charge in each pixel to be measured multiple times. The readnoise of a given pixel is reduced as the square root of the number of readouts, allowing one to reduce the amplifier noise of these devices to well below the 1/f knee. We have been able to achieve sub-electron readnoise performance with the floating gate amplifier (0.9 e^- rms with 16 reads per pixel). Using the FGA, the measured energy resolution at 5.9 keV is 120 eV (FWHM). The CCD also has a thin poly gate structure to maximize soft X-ray quantum efficiency. Two-thirds of the active area of the chip is covered only by an insulating layer (1000 Å) and a thin poly silicon electrode (400 Å). This design enhances the soft X-ray quantum efficiency, but retains the excellent charge transfer efficiency and soft X-ray charge collection efficiency of front-side illuminated devices. The measured energy resolution at 277 eV is 38 eV (FWHM) with a measured quantum efficiency of 15%. We also show that this device performs well below 100 eV, as demonstrated by the detection of Al L fluorescence at 72 eV with a measured FWHM of 16 eV.