Abstract
We demonstrate use of a charge-coupled device (CCD) with sub-electron readnoise performance as a non-dispersive X-ray spectrometer. The exceptionally low readnoise (0.9 electrons rms) was achieved by applying a floating gate output amplifier with 16 readouts per pixel. The soft X-ray quantum efficiency was enhanced over other front-side illuminated devices by using a novel thin-poly gate structure. The combination of sub-electron noise and good soft X-ray quantum efficiency have enabled us to detect photons in the EUV energy range (E < 100 eV) in photon counting mode with this detector. These low energy events are well separated from the readnoise floor. The measured energy resolution is 16.3 eV (FWHM) at Al L (E = 72 eV), 33.8 eV at C Kα (E = 277 eV) and 120 eV at Mn Kα (E = 5.9 keV).
Original language | English (US) |
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Pages (from-to) | 372-383 |
Number of pages | 12 |
Journal | Nuclear Inst. and Methods in Physics Research, A |
Volume | 361 |
Issue number | 1-2 |
DOIs | |
State | Published - Jul 1 1995 |
All Science Journal Classification (ASJC) codes
- Nuclear and High Energy Physics
- Instrumentation