Soft X-ray spectroscopy with sub-electron readnoise charge-coupled devices

R. P. Kraft, D. N. Burrows, G. P. Garmire, J. A. Nousek, J. R. Janesick, P. N. Vu

Research output: Contribution to journalArticlepeer-review

50 Scopus citations


We demonstrate use of a charge-coupled device (CCD) with sub-electron readnoise performance as a non-dispersive X-ray spectrometer. The exceptionally low readnoise (0.9 electrons rms) was achieved by applying a floating gate output amplifier with 16 readouts per pixel. The soft X-ray quantum efficiency was enhanced over other front-side illuminated devices by using a novel thin-poly gate structure. The combination of sub-electron noise and good soft X-ray quantum efficiency have enabled us to detect photons in the EUV energy range (E < 100 eV) in photon counting mode with this detector. These low energy events are well separated from the readnoise floor. The measured energy resolution is 16.3 eV (FWHM) at Al L (E = 72 eV), 33.8 eV at C Kα (E = 277 eV) and 120 eV at Mn Kα (E = 5.9 keV).

Original languageEnglish (US)
Pages (from-to)372-383
Number of pages12
JournalNuclear Inst. and Methods in Physics Research, A
Issue number1-2
StatePublished - Jul 1 1995

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation


Dive into the research topics of 'Soft X-ray spectroscopy with sub-electron readnoise charge-coupled devices'. Together they form a unique fingerprint.

Cite this