Sol-gel processing of oriented SrTiO3 thin films

Ulagaraj Selvaraj, Alamanda V. Prasadarao, Sridhar Komarneni, Rustum Roy

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26 Scopus citations


Sol-gel processing was employed to fabricate multilayered SrTiO3 thin films onto fused silica, Si (100) and SrTiO3 (110) substrates. A Sr-Ti alkoxide precursor solution, chemically modified with diisopropanolamine, was hydrolyzed and spin-coated onto these substrates. These films were annealed at 300 °C and then heated to 650 °C for 1 h in air, which resulted in the formation of phase pure crystalline SrTiO3. X-ray diffraction analysis indicated that partially oriented films were deposited onto fused silica and Si (100), while highly oriented film was formed on SrTiO3 (110). A typical microstructure of the film deposited on SrTiO3 (110) and heated at 650 °C for 1 h showed the presence of submicrometer grains on the order of 0.05 to 0.1 μm. The thickness of a single coating measured from the cross section of the SEM micrograph was about 0.1 to 0.2 μm.

Original languageEnglish (US)
Pages (from-to)123-127
Number of pages5
JournalMaterials Letters
Issue number1-3
StatePublished - Apr 1995

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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