Sol-gel processing of piezoelectric thin films

Isaac Robin Abothu; Yukio Ito; Patcharin Poosanaas; Sriram Kalpat; Sridhar Komarneni; Kenji Uchino

doi:10.1080/00150199908015791

Sol-gel processing of piezoelectric thin films

Isaac Robin Abothu, Yukio Ito, Patcharin Poosanaas, Sriram Kalpat, Sridhar Komarneni, Kenji Uchino

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Lead zirconate titanate, Pb(Zr_xTi_1-x)O₃ [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm² and a coercive field of 17 kV/cm.

Original language	English (US)
Pages (from-to)	191-195
Number of pages	5
Journal	Ferroelectrics
Volume	232
Issue number	1-4
DOIs	https://doi.org/10.1080/00150199908015791
State	Published - Jan 1 1999

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1080/00150199908015791

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abstract = "Lead zirconate titanate, Pb(ZrxTi1-x)O3 [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm2 and a coercive field of 17 kV/cm.",

author = "Abothu, {Isaac Robin} and Yukio Ito and Patcharin Poosanaas and Sriram Kalpat and Sridhar Komarneni and Kenji Uchino",

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AU - Abothu, Isaac Robin

AU - Ito, Yukio

AU - Poosanaas, Patcharin

AU - Kalpat, Sriram

AU - Komarneni, Sridhar

AU - Uchino, Kenji

PY - 1999/1/1

Y1 - 1999/1/1

N2 - Lead zirconate titanate, Pb(ZrxTi1-x)O3 [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm2 and a coercive field of 17 kV/cm.

AB - Lead zirconate titanate, Pb(ZrxTi1-x)O3 [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm2 and a coercive field of 17 kV/cm.

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Sol-gel processing of piezoelectric thin films

Abstract

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