Sol-gel processing of piezoelectric thin films

Isaac Robin Abothu; Yukio Ito; Patcharin Poosanaas; Sriram Kalpat; Sridhar Komarneni; Kenji Uchino

doi:10.1080/00150199908015791

Sol-gel processing of piezoelectric thin films

Isaac Robin Abothu, Yukio Ito, Patcharin Poosanaas, Sriram Kalpat, Sridhar Komarneni, Kenji Uchino

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Lead zirconate titanate, Pb(Zr_xTi_1-x)O₃ [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm² and a coercive field of 17 kV/cm.

Original language	English (US)
Pages (from-to)	191-195
Number of pages	5
Journal	Ferroelectrics
Volume	232
Issue number	1-4
DOIs	https://doi.org/10.1080/00150199908015791
State	Published - 1999

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1080/00150199908015791

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title = "Sol-gel processing of piezoelectric thin films",

abstract = "Lead zirconate titanate, Pb(ZrxTi1-x)O3 [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm2 and a coercive field of 17 kV/cm.",

author = "Abothu, \{Isaac Robin\} and Yukio Ito and Patcharin Poosanaas and Sriram Kalpat and Sridhar Komarneni and Kenji Uchino",

year = "1999",

doi = "10.1080/00150199908015791",

language = "English (US)",

volume = "232",

pages = "191--195",

journal = "Ferroelectrics",

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T1 - Sol-gel processing of piezoelectric thin films

AU - Abothu, Isaac Robin

AU - Ito, Yukio

AU - Poosanaas, Patcharin

AU - Kalpat, Sriram

AU - Komarneni, Sridhar

AU - Uchino, Kenji

PY - 1999

Y1 - 1999

N2 - Lead zirconate titanate, Pb(ZrxTi1-x)O3 [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm2 and a coercive field of 17 kV/cm.

AB - Lead zirconate titanate, Pb(ZrxTi1-x)O3 [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm2 and a coercive field of 17 kV/cm.

UR - https://www.scopus.com/pages/publications/0344864429

UR - https://www.scopus.com/inward/citedby.url?scp=0344864429&partnerID=8YFLogxK

U2 - 10.1080/00150199908015791

DO - 10.1080/00150199908015791

M3 - Article

AN - SCOPUS:0344864429

SN - 0015-0193

VL - 232

SP - 191

EP - 195

JO - Ferroelectrics

JF - Ferroelectrics

IS - 1-4

ER -

Sol-gel processing of piezoelectric thin films

Abstract

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