Sol-gel synthesis of Ba(Mg1/3Ta2/3)O3: Phase pure powder and thin films

D. Ravichandran; R. Meyer; R. Roy; R. Guo; A. S. Bhalla; L. E. Cross

doi:10.1016/0025-5408(96)00073-6

Sol-gel synthesis of Ba(Mg_1/3Ta_2/3)O₃: Phase pure powder and thin films

D. Ravichandran
, R. Meyer
, R. Roy
, R. Guo
, A. S. Bhalla
, L. E. Cross

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

Phase pure Ba(Mg_1/3Ta_2/3)O₃ (BMT) powders were prepared using Ba metal, Mg(OC₂H₅)₂, and Ta(OC₂H₅)₅ as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ∼ 600°C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.

Original language	English (US)
Pages (from-to)	817-825
Number of pages	9
Journal	Materials Research Bulletin
Volume	31
Issue number	7
DOIs	https://doi.org/10.1016/0025-5408(96)00073-6
State	Published - Jul 1996

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Sol-gel synthesis of Ba(Mg1/3Ta2/3)O3: Phase pure powder and thin films",

abstract = "Phase pure Ba(Mg1/3Ta2/3)O3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)2, and Ta(OC2H5)5 as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ∼ 600°C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.",

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year = "1996",

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T1 - Sol-gel synthesis of Ba(Mg1/3Ta2/3)O3

T2 - Phase pure powder and thin films

AU - Ravichandran, D.

AU - Meyer, R.

AU - Roy, R.

AU - Guo, R.

AU - Bhalla, A. S.

AU - Cross, L. E.

PY - 1996/7

Y1 - 1996/7

N2 - Phase pure Ba(Mg1/3Ta2/3)O3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)2, and Ta(OC2H5)5 as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ∼ 600°C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.

AB - Phase pure Ba(Mg1/3Ta2/3)O3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)2, and Ta(OC2H5)5 as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ∼ 600°C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.

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JF - Materials Research Bulletin

IS - 7

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Sol-gel synthesis of Ba(Mg_1/3Ta_2/3)O₃: Phase pure powder and thin films

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