Abstract
In this paper, we present the design and fabrication of MEMS hydrophones on a silicon wafer using standard NMOS process technology. The effects of two MOSFET amplifiers with different W/L ratios on the hydrophone performance are investigated. A piezoelectric polymer, polyvinylidene difluoride (PVDF), is employed as the sensing material. Acoustic impedance possessed by this piezoelectric material provides a reasonable match to that of water, which makes it very attractive for underwater applications. Measurements of the hydrophone devices were carried out in a pulse tube with a frequency range of 4-10 KHz. The results reveal that the hydrophone comprising a MOSFET with larger W/L ratio provides better sensitivity.
Original language | English (US) |
---|---|
Pages (from-to) | 368-377 |
Number of pages | 10 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3990 |
State | Published - 2000 |
Event | Smart Structures and Materials 2000 - Smart Electronics and MEMS - Newport Beach, CA, USA Duration: Mar 6 2000 → Mar 8 2000 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering