Solids Analysis Using Energetic Ion Bombardment and Multiphoton Resonance Ionization with Time-of-Flight Detection

Recently multiphoton resonanee ionization (MPRI) has been coupled with energetic Ion bombardment to yield a highly efficient and selective tool for solids analysis. Although this method promises to yield sub-part-per-billion determinations for many elements without chemical alteration of the matrix, there are a number of experimental factors which may ultimately limit the sensitivity of the technique. Among these factors are (a) duty cycle, (b) primary ion current, (c) sputter yield, (d) useful fraction of ejected particles, and (e) detection efficiency. In this paper we discuss the origin of these factors and their Influence on the use of MPRI of sputtered neutrals as a tool for the elemental analysis of solids.