Abstract
The electrical conduction in thin-film diamond synthesized by microwave plasma enhanced chemical vapor deposition has been studied with metal-diamond-silicon metal-insulator-semiconductor structures. Measurements over a wide temperature range provide evidence for space-charge-limited current in the presence of traps. An exponential distribution of traps with a peak value of the order of 3×1020 cm-3 eV-1 has been deduced from the current-voltage-temperature data.
Original language | English (US) |
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Pages (from-to) | 763-765 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 50 |
Issue number | 12 |
DOIs | |
State | Published - 1987 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)