Spectroscopic ellipsometry investigation of amorphous silicon nitride thin films

Keyphrases

• Spectroscopic Ellipsometry 100%
• Film Thickness 100%
• Amorphous Silicon Nitride 100%
• Silicon Nitride Film 100%
• Refractive Index 50%
• Systematic Variation 50%
• Structural Change 50%
• Relative Density 50%
• Oxygen Content 50%
• Attenuation Length 50%
• Film Density 50%
• Photoelectron 50%
• Density Variation 50%

Material Science

• Film 100%
• Thin Films 100%
• Amorphous Silicon 100%
• Silicon Nitride 100%
• Density 50%
• Film Thickness 33%
• Refractive Index 16%