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Spectroscopic ellipsometry studies of ferroelectric thin films
Susan Trolier-Mckinstry
Materials Science and Engineering
Materials Research Institute (MRI)
Nanofabrication Laboratory
Research output
:
Contribution to journal
›
Article
›
peer-review
5
Scopus citations
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Keyphrases
Spectroscopic Ellipsometry
100%
Ferroelectric Thin Film
100%
Dielectric Constant
50%
Depth Profile
50%
Surface Roughness
50%
Optical Properties
50%
Structural Inhomogeneity
50%
Crystallization
25%
Ion Beam
25%
Film Surface
25%
Electrical Properties
25%
Porosity
25%
Sol-gel
25%
Perovskite
25%
Phase Lead
25%
Annealing
25%
Smooth Surface
25%
Significant Level
25%
Coercive Field
25%
Remanent Polarization
25%
Film Thickness
25%
Deposition Methods
25%
Structural Heterogeneity
25%
Nucleation Mechanism
25%
Mathematical Modeling
25%
Bulk Properties
25%
Film Deposition
25%
Application Control
25%
Remanent
25%
Microstructural Defects
25%
Intrinsic Size Effect
25%
Sputtered Films
25%
Electro-optic Applications
25%
Electrical Properties of Thin Film
25%
Material Science
Ferroelectric Thin Films
100%
Thin Films
66%
Permittivity
66%
Surface Roughness
66%
Optical Property
66%
Film
33%
Ferroelectric Material
33%
Annealing
33%
Nucleation
33%
Film Thickness
33%
Film Deposition
33%
Sputtered Film
33%