Spectroscopic ellipsometry studies on ferroelectric surfaces

S. Trolier-McKinstry, R. E. Newnham, K. Vedam

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Summary form only given. Spectroscopic ellipsometry offers a means through which it should be possible to nondestructively characterize both intrinsic and processing-induced surface layers throughout a proposed thickness regime. Measurements of the ellipticity and azimuth of the reflected light were made between 300 and 700 nm using a xenon source with a rotating analyzer ellipsometer. A large BaTiO3 crystal oriented with the optic axis perpendicular to the surface was polished in steps down to 0.05-μm grit. After poling to remove 90° domains, ellipsometric data were collected at four angles of incidence. Several models for the surface region were examined by fitting all data sets simultaneously. The best fit, chosen using a nonlinear regression analysis, was for a layer approximately 140 angstrom thick with a refractive index considerably below those shown by bulk BaTiO3.

Original languageEnglish (US)
Title of host publication90 IEEE 7 Int Symp Appl Ferroelectr
PublisherPubl by IEEE
Number of pages1
ISBN (Print)0780301900
StatePublished - 1992
Event1990 IEEE 7th International Symposium on Applications of Ferroelectrics - Champaign, IL, USA
Duration: Jun 6 1990Jun 8 1990

Publication series

Name90 IEEE 7 Int Symp Appl Ferroelectr


Other1990 IEEE 7th International Symposium on Applications of Ferroelectrics
CityChampaign, IL, USA

All Science Journal Classification (ASJC) codes

  • General Engineering


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