TY - GEN
T1 - Spectroscopic ellipsometry studies on ferroelectric surfaces
AU - Trolier-McKinstry, S.
AU - Newnham, R. E.
AU - Vedam, K.
PY - 1992/12/1
Y1 - 1992/12/1
N2 - Summary form only given. Spectroscopic ellipsometry offers a means through which it should be possible to nondestructively characterize both intrinsic and processing-induced surface layers throughout a proposed thickness regime. Measurements of the ellipticity and azimuth of the reflected light were made between 300 and 700 nm using a xenon source with a rotating analyzer ellipsometer. A large BaTiO3 crystal oriented with the optic axis perpendicular to the surface was polished in steps down to 0.05-μm grit. After poling to remove 90° domains, ellipsometric data were collected at four angles of incidence. Several models for the surface region were examined by fitting all data sets simultaneously. The best fit, chosen using a nonlinear regression analysis, was for a layer approximately 140 angstrom thick with a refractive index considerably below those shown by bulk BaTiO3.
AB - Summary form only given. Spectroscopic ellipsometry offers a means through which it should be possible to nondestructively characterize both intrinsic and processing-induced surface layers throughout a proposed thickness regime. Measurements of the ellipticity and azimuth of the reflected light were made between 300 and 700 nm using a xenon source with a rotating analyzer ellipsometer. A large BaTiO3 crystal oriented with the optic axis perpendicular to the surface was polished in steps down to 0.05-μm grit. After poling to remove 90° domains, ellipsometric data were collected at four angles of incidence. Several models for the surface region were examined by fitting all data sets simultaneously. The best fit, chosen using a nonlinear regression analysis, was for a layer approximately 140 angstrom thick with a refractive index considerably below those shown by bulk BaTiO3.
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M3 - Conference contribution
AN - SCOPUS:0026981632
SN - 0780301900
T3 - 90 IEEE 7 Int Symp Appl Ferroelectr
BT - 90 IEEE 7 Int Symp Appl Ferroelectr
PB - Publ by IEEE
T2 - 1990 IEEE 7th International Symposium on Applications of Ferroelectrics
Y2 - 6 June 1990 through 8 June 1990
ER -