TY - JOUR
T1 - Sputtering of benzene sample by large Ne, Ar and Kr clusters - Molecular dynamics computer simulations
AU - Rzeznik, L.
AU - Paruch, R.
AU - Garrison, B. J.
AU - Postawa, Z.
PY - 2013/5
Y1 - 2013/5
N2 - Molecular dynamics simulations are employed to probe the role of an impact angle on emission effciency of organic molecules sputtered from benzene crystal bombarded by 15 keV Ne2953, Ar2953, and Kr2953 clusters. It is found that both the cluster type and the angle of incidence have significant effect on the emission effciency. The shape of the impact angle dependence does not resemble the dependence characteristic for medium size clusters (C60, Ar366), where sputtering yield only moderately increases with the impact angle, has a shallow maximum around 40° and then decreases. On the contrary, for the large projectiles (Ne 2953, Ar2953, and Kr2953) the emission effciency steeply increases with the impact angle, has a pronounced maximum around 55° followed by rapid signal decay. It has been found that the sputtering yield is the most sensitive to the impact angle change for Kr cluster projectiles, while change of the impact angle of Ne projectile has the smallest effect on the effciency of material ejection.
AB - Molecular dynamics simulations are employed to probe the role of an impact angle on emission effciency of organic molecules sputtered from benzene crystal bombarded by 15 keV Ne2953, Ar2953, and Kr2953 clusters. It is found that both the cluster type and the angle of incidence have significant effect on the emission effciency. The shape of the impact angle dependence does not resemble the dependence characteristic for medium size clusters (C60, Ar366), where sputtering yield only moderately increases with the impact angle, has a shallow maximum around 40° and then decreases. On the contrary, for the large projectiles (Ne 2953, Ar2953, and Kr2953) the emission effciency steeply increases with the impact angle, has a pronounced maximum around 55° followed by rapid signal decay. It has been found that the sputtering yield is the most sensitive to the impact angle change for Kr cluster projectiles, while change of the impact angle of Ne projectile has the smallest effect on the effciency of material ejection.
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U2 - 10.12693/APhysPolA.123.825
DO - 10.12693/APhysPolA.123.825
M3 - Article
AN - SCOPUS:84876845556
SN - 0587-4246
VL - 123
SP - 825
EP - 827
JO - Acta Physica Polonica A
JF - Acta Physica Polonica A
IS - 5
ER -