Sputtering of thin organic layers

R. Chatterjee, D. E. Riederer, C. A. Meserole, Nicholas Winograd, P. Cyganik, Z. Postawa

Research output: Contribution to journalConference articlepeer-review


Laser postionization technique has been used to investigate processes that occur during ion bombardment of thin organic layers. Dependence of the kinetic energy distributions has been investigated as a function of layer thickness and projectile type. Thin films obtained from self-assembled monolayer of phenylethanethiol on gold and C6H6 on silver have been probed. Results indicate that the sputtering mechanism depends on the organic material used. Phenylethanethiol molecules are emitted predominantly with thermal kinetic energies and the shape of the distribution depends on surface temperature. Emission of benzene is much more energetic and possesses characteristics similar to sputtering of metals. Emission of phenylethanethiol molecules is stimulated by a chemical reaction, which gently breaks the adsorbate surface bonds. Benzene molecules are emitted from the thin overlayer due to collisions with ejecting substrate atoms.

Original languageEnglish (US)
Pages (from-to)435-439
Number of pages5
JournalElectron Technology (Warsaw)
Issue number3-4
StatePublished - Dec 1 1998
EventProceedings of the 1997 5th Seminar on Surface and Thin Film Structures - Ustron, Pol
Duration: Sep 23 1997Sep 26 1997

All Science Journal Classification (ASJC) codes

  • Engineering(all)


Dive into the research topics of 'Sputtering of thin organic layers'. Together they form a unique fingerprint.

Cite this