Stepwise molding, etching, and imprinting to form libraries of nanopatterned substrates

Zhi Zhao, Yangjun Cai, Wei Ssu Liao, Paul S. Cremer

Research output: Contribution to journalArticlepeer-review

11 Scopus citations


Herein, we describe a novel colloidal lithographic strategy for the stepwise patterning of planar substrates with numerous complex and unique designs. In conjunction with colloidal self-assembly, imprint molding, and capillary force lithography, reactive ion etching was used to create complex libraries of nanoscale features. This combinatorial strategy affords the ability to develop an exponentially increasing number of two-dimensional nanoscale patterns with each sequential step in the process. Specifically, dots, triangles, circles, and lines could be assembled on the surface separately and in combination with each other. Numerous architectures are obtained for the first time with high uniformity and reproducibility. These hexagonal arrays were made from polystyrene and gold features, whereby each surface element could be tuned from the micrometer size scale down to line widths of ∼35 nm. The patterned area could be 1 cm2 or even larger. The techniques described herein can be combined with further steps to make even larger libraries. Moreover, these polymer and metal features may prove useful in optical, sensing, and electronic applications.

Original languageEnglish (US)
Pages (from-to)6737-6745
Number of pages9
Issue number22
StatePublished - Jun 4 2013

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Spectroscopy
  • Electrochemistry


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