Sticking coefficients of selenium and tellurium

Derrick S.H. Liu, Maria Hilse, Roman Engel-Herbert

Research output: Contribution to journalArticlepeer-review

8 Scopus citations


The sticking coefficients of selenium and tellurium were measured as a function of temperature. Molecular beams of the chalcogen elements supplied from thermal effusion cells were directed onto a heated quartz crystal microbalance, and the mass gain rate was detected as a function of temperature. Both sticking coefficients were found to sharply drop within a narrow temperature range of 20 and 30 °C from above 0.8 down to about 0.2 at film surface temperatures around 35 and 115 °C for selenium and tellurium, respectively. While the sticking coefficient of tellurium reached zero at temperatures above 150 °C, the sticking coefficient of selenium remained about 0.2 up to a film surface temperature of 60 °C, suggesting that selenium was supplied in different chemical forms. The direct and quantitative determination of the sticking coefficients provides important insights into the kinetics of chalcogenide-based film growth and points toward the need of a precise sample temperature control.

Original languageEnglish (US)
Article number023413
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - Mar 1 2021

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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