Stiction reliability prediction for polysilicon micro-cantilevers under shock

Pei Yao Wang, Jie Ying Tang, Cun Jiang Yu, Yun Fei En, Qian Shi

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


The reliability of MEMS is a key problem for its commercial application. The polysilicon microcantilever is a basic structure in MEMS. Mechanism of stiction failure of surfaces-micromachined microcantilever is introduced and a stiction reliability prediction model based on macro-mechanical theory and reliability method is presented. Finally the effect of micro-cantilever dimension and environment humidity on reliability is analyzed.

Original languageEnglish (US)
Pages (from-to)1602-1605
Number of pages4
JournalChinese Journal of Sensors and Actuators
Issue number5
StatePublished - Oct 2006

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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