TY - GEN
T1 - Stress Sensitivity of Micromachined AT-Cut Quartz Resonators Characterized Using Magnetostrictive Metglas Films
AU - Goel, Nishit
AU - Tadigadapa, Srinivas
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/26
Y1 - 2018/12/26
N2 - In this paper, stress sensitivity of micromachined A T -cut quartz cantilevers has been characterized by integrating micromachined AT-cut quartz cantilever-resonators with a magnetostrictive Metglas® 2605SAl thin film. The magnetostrictive material's properties were characterized by quantifying the dss-coefficient of the deposited films by the measurement of the out-of-plane deflection of the micro machined Metglas®-quartz unimorph cantilevers, using a laser Doppler vibrometer, as a function of applied magnetic field. The impedance characteristics at the bulk acoustic wave resonance of the quartz cantilever-resonator as a function of the applied magnetic field has also been characterized independently. Through these two measurements, quartz cantilever-resonators can be deduced to exhibit a sensitivity of 6.4 Hz/kPa of the film stress.
AB - In this paper, stress sensitivity of micromachined A T -cut quartz cantilevers has been characterized by integrating micromachined AT-cut quartz cantilever-resonators with a magnetostrictive Metglas® 2605SAl thin film. The magnetostrictive material's properties were characterized by quantifying the dss-coefficient of the deposited films by the measurement of the out-of-plane deflection of the micro machined Metglas®-quartz unimorph cantilevers, using a laser Doppler vibrometer, as a function of applied magnetic field. The impedance characteristics at the bulk acoustic wave resonance of the quartz cantilever-resonator as a function of the applied magnetic field has also been characterized independently. Through these two measurements, quartz cantilever-resonators can be deduced to exhibit a sensitivity of 6.4 Hz/kPa of the film stress.
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U2 - 10.1109/ICSENS.2018.8589780
DO - 10.1109/ICSENS.2018.8589780
M3 - Conference contribution
AN - SCOPUS:85060858725
T3 - Proceedings of IEEE Sensors
BT - 2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 17th IEEE SENSORS Conference, SENSORS 2018
Y2 - 28 October 2018 through 31 October 2018
ER -