@inproceedings{2eb33bb3756440f69289f9a14d2a173b,
title = "Structural and analytical studies of 4H silicon carbide MOSFETs with thermally grown oxides",
author = "Tsvetanka Zheleva and Igor Levin and Dan Habersat and Aivars Lelis and Morgen Dautrich and Patrick Lenahan",
year = "2005",
language = "English (US)",
isbn = "1424400848",
series = "2005 International Semiconductor Device Research Symposium",
pages = "139--140",
booktitle = "2005 International Semiconductor Device Research Symposium",
note = "2005 International Semiconductor Device Research Symposium ; Conference date: 07-12-2005 Through 09-12-2005",
}