Structural control of epitaxially grown sputtered perovskite thin films

Kiyotaka Wasa, Toshifumi Sato, Hideaki Adachi, Kentaro Setsune, S. Trolier-McKinstry, Darrell G. Schlom

Research output: Contribution to journalConference articlepeer-review

8 Scopus citations


Thin films of perovskite Pb-Ti-O3 families were heteroepitaxially grown by sputtering on (0001)sapphire and/or (001)SrTiO3(ST). These epitaxial films contained microstructures, although X-ray diffraction analysis suggested formation of single crystal phase with three dimensional crystal orientation. Their microstructures were studied by the electron microscopy, atomic force microscopy, and spectroscopic ellipsometry so as to find factors which influence the formation of the microstructure. It was found that the orientation of the substrate surface and the chemical composition of adatoms during initial film growth strongly affected the formation of the microstructures. Sputtered PbTiO3(PT) thin films under a stoichiometric condition on a miscut(001) ST(miscut 1.7 degree) realized the growth of continuous single crystal thin films of 10-100nm thick with extremely smooth surface with surface roughness less than 3nm. Deposition on a miscut substrate under a stoichiometric condition is essential to make continuous thin films of perovskite of single crystal phase.

Original languageEnglish (US)
Pages (from-to)151-161
Number of pages11
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 1996
EventProceedings of the 1995 MRS Fall Symposium - Boston, MA, USA
Duration: Nov 27 1995Dec 1 1995

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


Dive into the research topics of 'Structural control of epitaxially grown sputtered perovskite thin films'. Together they form a unique fingerprint.

Cite this