Structural modelling of nano-amorphous Si-O-N films in silicon nitride ceramics

Keyphrases

• Amorphous Si 100%
• Structural Modeling 100%
• Glassy Film 100%
• High-resolution Electron Energy Loss Spectroscopy (HREELS) 50%
• Molecular Dynamics Simulation 50%
• N Atoms 50%
• Radial Distribution Function 50%
• Modeling Results 50%
• Spectroscopy Studies 50%
• Many-body 50%
• Interatomic Potential 50%
• O Atom 50%
• Bond Order 50%
• Spatially Resolved 50%
• Si-N 50%
• Silicon Oxynitride (SiON) 50%
• Chemical Profile 50%
• Composition Profile 50%

Material Science

• Film 100%
• Silicon Nitride 100%
• Silicon 25%
• Electron Energy Loss Spectrometry 25%
• Oxynitride 25%

Chemical Engineering

• Silicon Nitride 100%