Studies of mist deposited high-k dielectrics for MOS gates

D. O. Lee, P. Roman, C. T. Wu, W. Mahoney, M. Horn, P. Mumbauer, M. Brubaker, R. Grant, J. Ruzyllo

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations

Fingerprint

Dive into the research topics of 'Studies of mist deposited high-k dielectrics for MOS gates'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy