Study of fluorine diffusion in metallized polymers using ion beam techniques

A. Kumar, H. Bakhru, B. Wang, G. R. Yang, J. Fortin, J. McDonald, T. M. Lu

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


19F(p, αγ)16O nuclear reaction analysis (NRA) technique has been used to quantitatively determine fluorine concentration and distribution in fluorinated polymeric films. By varying the proton beam energy over a suitable range and measuring the γ-ray yield at each step, combined with the knowledge of energy loss per unit length of the film, the fluorine depth profile is obtained. The diffusion of fluorine at the Al/PA-F (fluorinated parylene) interface is clearly identified after the sample is annealed at 450 °C for 2 h. Rutherford Backscattering Spectrometry (RBS) data gives similar results. Ion beam techniques provide an attractive method to characterize the stability of the metal-fluorinated film interface.

Original languageEnglish (US)
Pages (from-to)136-138
Number of pages3
JournalMaterials Chemistry and Physics
Issue number2
StatePublished - May 25 1999

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics


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