Study of misaligned lateral combdrive static actuators

I. Avdeev; M. Lovell; Oladipo Onipede, Jr.

Study of misaligned lateral combdrive static actuators

I. Avdeev
, M. Lovell
, Oladipo Onipede, Jr.

School of Engineering (Behrend)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The misalignment of lateral combdrive fingers was studied using analytical and finite element techniques. Using the principle of virtual work, the required driving force, and the forces and moments that develop during in-plane combdrive misalignment were theoretically calculated. Electrostatic uncoupled 2-D and 3-D finite element models were then used to perform energy computations during misalignment. Finally, a stability analysis of misaligned combdrive fingers was performed using a coupled 2-D finite element approach. The analytical and numerical results were compared and found to vary due to fringing in the electrostatic fields. The significance of the fringing fields and stability equilibrium states were subsequently discussed with respect to the precision of MEMS devices.

Original language	English (US)
Title of host publication	2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Editors	M. Laudon, B. Romanowicz
Pages	570-573
Number of pages	4
Volume	2
State	Published - 2003
Event	2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States Duration: Feb 23 2003 → Feb 27 2003

Other

Other	2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Country/Territory	United States
City	San Francisco, CA
Period	2/23/03 → 2/27/03

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

@inproceedings{50679a257d594d4e89e7b987ce0f1b22,

title = "Study of misaligned lateral combdrive static actuators",

abstract = "The misalignment of lateral combdrive fingers was studied using analytical and finite element techniques. Using the principle of virtual work, the required driving force, and the forces and moments that develop during in-plane combdrive misalignment were theoretically calculated. Electrostatic uncoupled 2-D and 3-D finite element models were then used to perform energy computations during misalignment. Finally, a stability analysis of misaligned combdrive fingers was performed using a coupled 2-D finite element approach. The analytical and numerical results were compared and found to vary due to fringing in the electrostatic fields. The significance of the fringing fields and stability equilibrium states were subsequently discussed with respect to the precision of MEMS devices.",

author = "I. Avdeev and M. Lovell and \{Onipede, Jr.\}, Oladipo",

year = "2003",

language = "English (US)",

isbn = "0972842209",

volume = "2",

pages = "570--573",

editor = "M. Laudon and B. Romanowicz",

booktitle = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",

note = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003 ; Conference date: 23-02-2003 Through 27-02-2003",

}

TY - GEN

T1 - Study of misaligned lateral combdrive static actuators

AU - Avdeev, I.

AU - Lovell, M.

AU - Onipede, Jr., Oladipo

PY - 2003

Y1 - 2003

N2 - The misalignment of lateral combdrive fingers was studied using analytical and finite element techniques. Using the principle of virtual work, the required driving force, and the forces and moments that develop during in-plane combdrive misalignment were theoretically calculated. Electrostatic uncoupled 2-D and 3-D finite element models were then used to perform energy computations during misalignment. Finally, a stability analysis of misaligned combdrive fingers was performed using a coupled 2-D finite element approach. The analytical and numerical results were compared and found to vary due to fringing in the electrostatic fields. The significance of the fringing fields and stability equilibrium states were subsequently discussed with respect to the precision of MEMS devices.

AB - The misalignment of lateral combdrive fingers was studied using analytical and finite element techniques. Using the principle of virtual work, the required driving force, and the forces and moments that develop during in-plane combdrive misalignment were theoretically calculated. Electrostatic uncoupled 2-D and 3-D finite element models were then used to perform energy computations during misalignment. Finally, a stability analysis of misaligned combdrive fingers was performed using a coupled 2-D finite element approach. The analytical and numerical results were compared and found to vary due to fringing in the electrostatic fields. The significance of the fringing fields and stability equilibrium states were subsequently discussed with respect to the precision of MEMS devices.

UR - https://www.scopus.com/pages/publications/6444243822

UR - https://www.scopus.com/pages/publications/6444243822#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:6444243822

SN - 0972842209

VL - 2

SP - 570

EP - 573

BT - 2003 Nanotechnology Conference and Trade Show - Nanotech 2003

A2 - Laudon, M.

A2 - Romanowicz, B.

T2 - 2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Y2 - 23 February 2003 through 27 February 2003

ER -

Study of misaligned lateral combdrive static actuators

Abstract

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All Science Journal Classification (ASJC) codes

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