Study on a flexoelectric microphone using barium strontium titanate

S. R. Kwon; W. B. Huang; S. J. Zhang; F. G. Yuan; X. N. Jiang

doi:10.1088/0960-1317/26/4/045001

Study on a flexoelectric microphone using barium strontium titanate

S. R. Kwon
, W. B. Huang
, S. J. Zhang
, F. G. Yuan
, X. N. Jiang

Materials Research Institute (MRI)

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba_0.65Sr_0.35TiO₃) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

Original language	English (US)
Article number	045001
Journal	Journal of Micromechanics and Microengineering
Volume	26
Issue number	4
DOIs	https://doi.org/10.1088/0960-1317/26/4/045001
State	Published - Feb 22 2016

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/26/4/045001

Cite this

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title = "Study on a flexoelectric microphone using barium strontium titanate",

abstract = "In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.",

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AU - Kwon, S. R.

AU - Huang, W. B.

AU - Zhang, S. J.

AU - Yuan, F. G.

AU - Jiang, X. N.

PY - 2016/2/22

Y1 - 2016/2/22

N2 - In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

AB - In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

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Study on a flexoelectric microphone using barium strontium titanate

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